M-25
M-25

Description

The M-25 is an unfilled, small pore size polyurethane pad. (Modified version of LP-57)
It is designed for reduced defects during silicon wafer primary polishing.

Application

Sapphire, Silicon

Benefits

  • High stock removal rate
  • Low pad wear
  • Low defect level

Physical Characteristics

  • Density [g/cm³ (lb/ft³)]: 0.42 (26.0)
  • Hardness (Shore A): 89
  • Compressibility (%): 7.5
  • Elastic Rebound (%): 90

Documents

Document Type Langauage
Technical Data Sheet English (US)
Brochure English (US)