M-25
M-25
Description
The M-25 is an unfilled, small pore size polyurethane pad. (Modified version of LP-57)
It is designed for reduced defects during silicon wafer primary polishing.
Application
Sapphire, Silicon
Benefits
- High stock removal rate
- Low pad wear
- Low defect level
Physical Characteristics
- Density [g/cm³ (lb/ft³)]: 0.42 (26.0)
- Hardness (Shore A): 89
- Compressibility (%): 7.5
- Elastic Rebound (%): 90
Documents
Document Type | Langauage | |
---|---|---|
Technical Data Sheet | English (US) | |
Brochure | English (US) |