Description

ESM-013 is an unfilled semiconductor polishing pad.

Application

• Precision Optics
• Silicon
• Semiconductor Substrate

Benefits

High stock rate with dense ceramics

Physical Characteristics

• Density [g/cm³ (lb/ft³)]: 0.59 (37.0)
• Hardness (Shore A): 88
• Compressibility (%): 9.3
• Elastic Rebound (%): 93