Description

ESM-U is used for polishing single crystal silicon carbide, and titanium CMP.

Application

• Sapphire
• CMP-Titanium
• Silicon Carbide Crystal

Benefits

Superior flatness for titanium CMP processes

Physical Characteristics

• Density [g/cm³ (lb/ft³)]: 0.70 (44.0)
• Hardness (Shore D): 46
• Compressibility (%): 7.5
• Elastic Rebound (%): 93